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    Fine Ceramics(Advanced Ceramics)

    By adding a conductive material to zirconium oxide, we created a ceramic that has the optimal surface resistivity against static electricity.
    This ceramic slowly eliminates any charge of static electricity. Therefore, it is used for jigs and other components in production lines to take advantage of how it prevents electrostatic damage and erroneous suction of products from static electricity.
    Our Zirconia Ceramics for ESD Protection maintain the outstanding mechanical properties of zirconia, and have extremely stable semiconductive properties (volume resistivity) even inside the product. They protect electronic and semiconductor device parts from electrification problems caused by contact/separation.

    Features

    • High strength and stable semiconductive material
      High strength and optimal resistivity value can be selected from material variations with stable semiconductive property (volume resistivity: 105 to 109Ω).
    • Supports high-precision complex shapes
      Press molding, injection molding, cutting, and a high-precision grinding process make it possible to support a wide range of shapes from simple to complex.
    • Metal assembly by conductive bonding technology
      Proprietary conductive adhesion technology* supports product assemblies that are ceramic and metal.
      *According to a survey by Kyocera (as of August 25, 2022)

    High strength ESD material

    Materials with low surface resistivity tend to have low strength due to the effects of additives. However, Kyocera has developed a new material that meets the demand for increased strength associated with the miniaturization and thinning of parts.

    Relationship between flexural strength (3-point bending) and surface resistivity of Kyocera's zirconia materials

    Relationship between flexural strength (3-point bending) and surface resistivity of Kyocera's zirconia materials

    Application Examples

    Electrically conductive zirconia ceramics are used in manufacturing processes that require ESD protection and wear resistivity (hardness) for electronic device parts, semiconductor processing parts, etc.
    (Suction nozzles for transportation, jigs for slicing equipment, tweezers for inspection, etc.)

    • Suction nozzle for transportation

      Suction nozzle for transportation

    • Jigs for slicing equipment

      Jigs for slicing equipment

    • Tweezers for inspection

      Tweezers for inspection

    Tip of suction nozzle for transportation

    This is an example of the shape for the tip of the suction nozzle for transportation.

    小口径ノズル先端部
    Shape Samples
    Shape Samples

    *This is an example of manufacturing with material code Z21H12 or Z21H14.
    *We can also support shapes other than those above.
    * For round-hole shaped products, high-precision processing of Φ0.020±0.003 is also possible by polishing.
    *Conductive adhesion with metal parts is also possible.

    Conductive Adhesion Technology

    The electrostatic properties and charge transfer rate of a material depend on its surface resistivity. In general, semiconductive materials are not prone to be charged. However, when they are charged, there is a possibility of electrostatic breakdown.
    Kyocera is capable of metal assembly based on our proprietary conductive adhesion technology* and many years of experience, and we can solve various problems related to static electricity.

    *According to survey by Kyocera (as of August 25, 2022)

    ■ When no conductive adhesive is used

    When no conductive adhesive is used

    ■ When conductive adhesive is used

    When conductive adhesive is used

    Property Data Comparison

    Comparison of main properties of Kyocera's Zirconia Ceramics for ESD Protection and other materials

    Material
    Material Code    		 ESD Protection Zirconia
    Z21H04 Z21H05 Z21H07 Z21H12 Z21H14
    Color Black Black Ivory Black Black
    Density g/cm3 5.6 5.8 5.7 5.7 5.7
    Mechanical Properties Vickers Hardness HV9.807N GPa 10.8 12.4 7.8 12.4 12.4
    Flexural Strength (3-point Bending) MPa 740 685 600 1,000 1,175
    Young’s Modulus GPa 210 210 200 220 220
    Thermal Properties C.T.E 40～400℃ × 10-6/K 10.3 10.4 9.2 10.8 10.4
    Thermal Conductivity 20℃ W/（m・K） 3.0 3.9 3.5 4.0 4.0
    Electrical Properties Surface Resistivity Value Ω 108-109 106-107 107-108 106-107 106-107
    Volume Resistivity 20℃ Ω・cm 107-109 105-107 106-108 105-106 105-106
    Material
    Material Code    		 Silicon Carbide (SiC) Alumina   Stainless Steel
    SC211O SC1000 AＯ442Ｏ   SUS304
    Color Black Black Dark Brown   -
    Density g/cm3 3.2 3.16 3.7   7.93
    Mechanical Properties Vickers Hardness HV9.807N GPa 22.0 23.0 9.6   6.4
    Flexural Strength (3-point Bending) MPa 600 500 245   519
    Young’s Modulus GPa 430 440 284   206
    Thermal Properties C.T.E 40～400℃ × 10-6/K 3.7 3.7 7,4   10,4
    Thermal Conductivity 20℃ W/（m・K） 60 200 12   26
    Electrical Properties Volume Resistivity 20℃ Ω・cm 105 108 >109   10-3

    *Representative values based on results of internal measurement.
    * Z21H07 is a non-magnetic material.

    Volume Resistivity

    Examples of Kyocera's Zirconia Ceramics for ESD Protection and other materials.
    By selecting the appropriate material from among the static diffusive areas according to the application, it is possible to greatly reduce damage and breakage of parts during manufacturing.

    Volume Resistivity
    Measuring Method
    Volume Resistivity

    Surface Resistivity Value (Impact of surface finishing conditions)

    Kyocera changed the surface finishing conditions and the depth from the surface for our Zirconia Ceramics for ESD Protection, and then measured the surface resistivity value.
    Since volume resistivity is extremely stable even inside the product, the surface resistivity value is also stable regardless of the depth from the surface layer and surface specifications.

    Surface Resistivity Value (Impact of surface finishing conditions)
    Measurement Condition
    Measuring Equipment: Super Insulation Meter "SUPER MEGOHMMETER, SM-8220" (made by HIOKI)
    Material: Zirconia Z21H07
    Size: 72 x 48 x 5(mm)
    Processed from block

    Surface Resistivity Value (Impact of heat treatment)

    We heated our Zirconia Ceramics for ESD Protection at 600°C and then cooled it for one hour. We repeated this process for two cycles and measured the surface resistivity values at nine different points for each cycle.
    There is no change in the surface resistivity value even after heat treatment, and the ceramics are extremely stable.

    Surface Resistivity Value (Impact of heat treatment)
    Measurement Condition
    Measuring Equipment: Super Insulation Meter "SUPER MEGOHMMETER, SM-8220" (made by HIOKI)
    Material: Zirconia Z21H07
    Size: 50 x 50 x 5 (mm)
    Processed from block
    Measuring Method
    Surface Resistivity Value (Impact of heat treatment)

    *Similar to general zirconia materials, there are cases where mechanical properties are impacted when used under high-temperature conditions. Contact us for details.

    Please feel free to contact us if you are considering high-strength, high-wear resistant ESD protection parts and jigs required in the electrical, electronic, and semiconductor fields.

    Values are based on typical material properties and
    may vary according to product configuration and manufacturing process.

    PG